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用于非规则结构检测的空间滤波器设计(MATLAB代码)

于 2022-02-19 发布 文件大小:36.81 kB
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针对光栅等二元光学元件的制造过程中的非规则结构的检测问题,提出一种检测系统的原理设计,该系统应能够完成待测结构与标准结构的比对,得到待测结构的制造误差。根据所给出的4F 光学系统及空间滤波器的系统,分析该系统的原理,进行理论推导,并通过MATLAB 编写程序对该系统原理进行仿真。并进行误差因素的影响分析。

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