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mdpsas

于 2009-05-14 发布 文件大小:403KB
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  MDPSAS工具箱是马里兰大学开发的,基于MATLAB的一套面向对象的模块化仿真工具箱。包含半导体生产过程中的许多对象,对于研究学习是很好的指导材料。(mdpsas is a MATLAB-based set of object-oriented modular simulation tools for solving lumped and spatially distributed models generated from chemical process design and simulation problems. The framework facilitates an evolutionary approach to simulator development, starting with a simple process description and building model complexity and testing modeling hypothesis in a step-by-step manner)

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